Autolithography
Pronunciation: /ˈɔtoʊˈɫəθɑɡɹəfi/
Autolithography (noun)
- A method that creates a patterned surface by using a system that prepares the pattern automatically, without manual mask making.
Examples
- The lab used autolithography for self-made mask patterning.
- Autolithography supports self-made mask patterning in small devices.